What is TMR Sensor Technology? Key Advantages and Comparison with AMR and GMR

What is TMR Sensor Technology? Key Advantages and Comparison with AMR and GMR

As technology advances and the demand for smart devices grows, the performance requirements for magnetic sensors have reached new heights. Tunnel Magnetoresistance (TMR) sensors, with their exceptional sensitivity, low power consumption, and high precision, have emerged as a cutting-edge solution in magnetic field sensing. TMR sensors are widely used across industries such as automotive, industrial, consumer electronics, and healthcare, especially excelling in high-precision magnetic field measurement, motion sensing, and position detection. This article delves into the principles, technological advantages, and applications of TMR sensors, while providing a detailed comparison with other leading magnetic sensor technologies, including AMR and GMR. By the end of this article, readers will gain a comprehensive understanding of the potential of TMR sensors and how to integrate them into modern intelligent systems.

What is the TMR (Tunnel Magnetoresistance) Effect?

Magnetic sensing technology has evolved through several stages, from the Hall effect to AMR (Anisotropic Magnetoresistance), GMR (Giant Magnetoresistance), and finally to the TMR effect. Hall sensors are widely used in consumer electronics due to their low cost and ease of use; AMR technology improved sensitivity and performance; GMR further expanded the magnitude of resistance change; and the TMR effect, utilizing quantum tunneling mechanisms, pushed magnetic sensing technology to higher levels of sensitivity and accuracy. The TMR effect can be considered a key milestone in the development of magnetic sensing technology.

Figure: Evolution of magnetic sensing technologies

Each progression in magnetic sensing technology has brought significant performance improvements. From the low-cost features of Hall sensors to the gradually improved sensitivity of AMR and GMR technologies, and to the low power consumption and high precision achieved by TMR through quantum tunneling, this evolution responds to the growing market demand for high-performance sensors.

The TMR (Tunnel Magnetoresistance) effect is a magnetic resistance phenomenon based on quantum tunneling. When the magnetic field changes, electrons tunnel through a very thin insulating layer (usually made of oxide or nitride) between two ferromagnetic materials (ferromagnetic layers), causing a significant change in resistance. This resistance change is much greater than that of traditional magnetic effects (such as the Hall effect and AMR effect), giving TMR sensors higher sensitivity and noise suppression capabilities.

The discovery of the TMR effect dates back to the 1970s, but it was only with advancements in material science and nanotechnology that TMR sensors began to see practical applications. The effect is used to detect the strength and direction of external magnetic fields and is widely applied in areas such as angle sensing, position monitoring, and speed measurement.

Having understood the basic principles of the TMR effect, we will further explore how TMR sensors apply this effect in magnetic field detection and their unique working mechanisms.

Working Principle of TMR Sensors

Core Component – MTJ (Magnetic Tunnel Junction)

The core structure of a TMR sensor is the Magnetic Tunnel Junction (MTJ), whose operation relies on the collaborative effect of the hard magnetic layer, soft magnetic layer, and insulating layer (as shown in the figure below). Additionally, to achieve signal output and processing, MTJ elements are typically combined with CMOS circuits.

Figure:Magnetic tunneling junction (MTJ) structure

The alignment of magnetic moments between the hard magnetic layer and the soft magnetic layer (parallel or anti-parallel) directly affects the tunneling probability of electrons, resulting in changes in resistance. This change in resistance forms the basis of magnetic field detection in TMR sensors.

Material Selection and Performance Optimization

The performance of TMR sensors is significantly influenced by material selection and design optimization:

Core Principle – TMR Effect

The core working principle of the TMR sensor is based on the TMR effect (Tunnel Magnetoresistance Effect). This effect allows the flow of electrons via quantum tunneling, with its efficiency affected by the alignment of the magnetic moments between the two ferromagnetic layers (hard magnetic layer and soft magnetic layer).

In the absence of an external magnetic field, the magnetic moments of the two magnetic layers are typically aligned parallel to each other (as shown in the left-side example of the diagram), where the spin alignment of tunneling electrons is high, leading to low resistance and high current flow. When an external magnetic field is applied, the magnetic moment of the soft magnetic layer gradually deviates from the direction of the hard magnetic layer, potentially reaching an anti-parallel alignment (as shown in the right-side example). In this case, the spin alignment of the electrons decreases, reducing the tunneling probability, which leads to an increase in resistance and a decrease in current flow.

Figure:Schematic diagram of the structure and working principle of TMR sensor

As shown in the figure above, when the magnetic moments of the hard and soft magnetic layers are aligned (parallel state), the spin alignment of tunneling electrons is high, resulting in increased tunneling efficiency through the insulating layer, lower resistance, and higher current flow. When the magnetic moments are oppositely aligned (anti-parallel state), the spin alignment decreases, reducing tunneling probability, causing a significant increase in resistance and a decrease in current flow.

The regulation of resistance by the alignment of magnetic moments forms the core working mechanism of TMR sensors. In summary:

The magnitude of this resistance change is closely related to the strength and direction of the external magnetic field. By detecting changes in resistance, TMR sensors can accurately sense the intensity and direction of magnetic fields. This change is often very significant, enabling TMR sensors to capture signals even in weak magnetic fields, while maintaining high stability in strong magnetic field environments.

TMR vs AMR vs GMR Sensors

Magnetic sensors play a key role in many modern technologies, with applications ranging from consumer electronics to industrial control. The following is a comprehensive comparison of TMR (Tunnel Magnetoresistance), AMR (Anisotropic Magnetoresistance), GMR (Giant Magnetoresistance), and traditional Hall effect sensors, focusing on principles, structures, performance, and applicable scenarios.

Comparison of Magnetic Sensor Principles and Structures

Although all three magnetic resistance sensors (AMR, GMR, and TMR) are based on the magnetoresistance effect, their operating principles and internal structures differ significantly:

Type Core Principle Internal Structure
AMR Based on changes in resistance due to the alignment of magnetic moments. The resistance of magnetic materials changes under the influence of an external magnetic field. Single layer of magnetic material (Free layer).
GMR Based on a non-magnetic spacer layer between two magnetic layers. Resistance changes when the magnetic moments of the two layers are altered. Includes soft magnetic layer, spacer layer (non-magnetic metal), and hard magnetic layer (fixed magnetic moment direction).
TMR Based on quantum tunneling effects, where electrons tunnel through the insulating layer (tunnel barrier) between magnetic layers, and resistance changes with the alignment of magnetic moments. Includes hard magnetic layer, soft magnetic layer, and insulating layer (e.g., oxide barrier).

From the comparison, it is clear that the unique feature of TMR sensors lies in the insulating layer used. This structure enables TMR sensors to far outperform other magnetic sensors in terms of sensitivity and resolution.

Figure:Structures of AMR, GMR, and TMR elements (schematic diagrams)

Performance Parameter Comparison

Given the differences in principles, TMR sensors exhibit significant performance advantages. Their magnetoresistance ratio can reach up to 100%, with output signals approximately 20 times higher than AMR sensors and 6 times higher than GMR sensors. The following figure visually shows the trend of output signals for the three sensors as the angle changes, where it is evident that the output amplitude of TMR is significantly higher than that of AMR and GMR, further confirming its high sensitivity.

Figure: Comparison of output signals between TMR, GMR, and AMR sensors

In addition to the significant advantage in output signal, TMR sensors also excel in overall performance parameters such as power consumption, chip size, resolution, and temperature adaptability.

Below is a comparison of key performance indicators for TMR, AMR, GMR, and Hall effect sensors:

Feature Hall Effect AMR GMR TMR
Power Consumption (mA) 5~20 1~10 1~10 0.001~0.01 (minimum)
Chip Size (mm²) 1 × 1 1 × 1 1 × 2 0.5 × 0.5 (minimum)
Magnetic Field Sensitivity (mV/V/Oe) ~0.05 ~1 ~3 ~100 (maximum)
Dynamic Range (Oe) ~10,000 (widest) ~10 ~100 ~1,000
Resolution (nT/√Hz) >100 0.1~10 1~10 0.1~10 (similar to AMR)
Temperature Performance (°C) <150 <150 <150 <200 (maximum)

From the comparison of performance metrics, we find that TMR sensors have significant advantages in several key aspects, making them particularly suitable for applications requiring high precision, low power consumption, and operation in complex environments. It is worth mentioning that these performance advantages have already been verified in practical products. For example, the Gravity: BMM350 Triple-Axis Magnetometer Sensor adopts TMR technology, combined with field impact recovery features, ensuring stable and reliable measurements even under dynamic magnetic field interference.

Therefore, we summarize the main advantages of TMR sensors:

Applications of TMR Sensors

Due to their high sensitivity, low power consumption, and high resolution, TMR sensors demonstrate extensive application value across various industries. Below are several typical application scenarios:

Conclusion

TMR sensors, with their ultra-high sensitivity, extremely low power consumption, and excellent temperature adaptability, have become a key development direction in modern magnetic field sensing technology. Although there are still challenges related to cost and manufacturing processes, their significant advantages in high-precision detection and complex environmental applications make them one of the key technologies in the future magnetic sensor market.

With the continuous advancement of materials science and sensor design, the performance of TMR sensors will continue to improve, and their range of applications will expand. Industries such as automotive electronics (e.g., motor control and autonomous driving systems), industrial automation (e.g., equipment health monitoring and motion control), consumer electronics (e.g., smartphones and wearable devices), and healthcare (e.g., precision imaging and magnetic field monitoring) are constantly exploring the potential of TMR sensors.

It is foreseeable that TMR sensors will drive further innovation in the field of magnetic sensing with their technological advantages, providing more reliable and efficient solutions for the development of modern technology.